Superiority of half - wavelength helicon antennas
نویسندگان
چکیده
Plasma densities produced by half-and full-wavelength helical antennas in helicon discharges are compared. Contrary to theoretical expectations, half-wavelength antennas are more efficient than full-wavelength ones in producing plasma downstream. This effect is probably caused by capacitive coupling , which interferes with inductive coupling and is not included in the computations.
منابع مشابه
Superiority of half - wavelength helicon antennae
Plasma densities produced by halfand full-wavelength (HW and FW) helical antennae in helicon discharges are compared. It is found that HW antennae are more efficient than FW ones in producing plasma downstream from the antenna. The measured wave amplitudes and the apparent importance of downstream ionization do not agree with computations.
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تاریخ انتشار 2001